Perticipating in SEMICON Japan 2001
2001.12.5-7

We are going to participate in SEMICON Japan to be held at Makuhari Messe for the period of three days from December 5th through 7th, 2001. SEMICON JAPAN is an annual exhibition as an event with which the year for semiconductor world is rounded off.

Our exhibits are listed below. We are mainly introducing our CVD materials for the next generation, such as High Dielectric Material, Electrode Material, Material for Circuit Board, and Gate Insulating Materials. We are looking forward to your visits with our booth.

Period: December 5th, Wed. through 7th, Fri., 2001
Opening hours: 10.00a.m. - 5.00p.m.
Venir: Makuhari Messe
Booth No.: 8-B004, in Hall 8
Exhibits:
<Semiconductor-related materials>
*Highly dielectric materials:
- BST <Ba(METHD)2/Sr(METHD)2/Ti(MPD)(METHD)2>
- PZT <Pb(METHD)2/Zr(METHD)2/Ti(MPD)(METHD)2>
- BLT <Bi(MMP)3/La(EDMDD)3/Ti(MPD)(METHD)2>
* Electrode materials: Ru<Ru(OD)3>
* Circuit board materials: Cu<Cu(EDMDD)2>
* Gate insulating materials: Zr/Hf/Pr/La CVD materials
* Optical device materials: SiOP-31/SiOB-11/SiOT-41/Ge/Er CVD material
* Exhaust gas neutralizing equipment: Adeka Clean Pas
<Fine Etching Control System>
Adeka BEAC System

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